Specifications
Average Power
>300 W @ 6.5 kHz
Peak Power
2.5 kW
Panel Processing
Dual-head two panel system
Panel Size Range
16x20 in. to 22x24 in.
Panel Height Detection
Touchdown sensor (calibrated to align with camera focus)
Part Thickness Range
40 to 2000 um
Energy Monitoring
Real time pulse energy monitoring (programmable alarm settings)
Automation Accuracy
500 um (panel to chuck)
Processing
CDD/Large Window/Conformal Mask/LTH
Scan Area
20x20mm (ESI’s patented Third DynamicsTM beam positioning technology)
Scan Frequency
(per head): 5200 points per second (500 um pitch)
Throughput
Up to 9500 pps
Automation Panel Autoloader
std, NG panel, Flipping
Total System Accuracy
+/- 8 um mean +3Σ
Via Diameter Range
35-200 um
Laser Pulse Frequency
Up to 6.5 kHz
Average Power
>300 W @ 6.5 kHz
Peak Power
2.5 kW
Panel Processing
Dual-head two panel system
Panel Size Range
16x20 in. to 22x24 in.
Panel Height Detection
Touchdown sensor (calibrated to align with camera focus)
Part Thickness Range
40 to 2000 um
Energy Monitoring
Real time pulse energy monitoring (programmable alarm settings)
Automation Accuracy
500 um (panel to chuck)
Processing
CDD/Large Window/Conformal Mask/LTH
Scan Area
20x20mm (ESI’s patented Third DynamicsTM beam positioning technology)
Scan Frequency
(per head): 5200 points per second (500 um pitch)
Throughput
Up to 9500 pps
Automation Panel Autoloader
std, NG panel, Flipping
Total System Accuracy
+/- 8 um mean +3Σ
Via Diameter Range
35-200 um
Laser Pulse Frequency
Up to 6.5 kHz
